Concepedia

Publication | Closed Access

Large piezoelectricity on Si from highly (001)-oriented PZT thick films via a CMOS-compatible sputtering/RTP process

DOI

34

Citations

54

References

2019

Year

Yingying Wang, Hongbo Cheng, Jing Yan, Ning Chen, Yan Peng, Feng Yang, Jun Ouyang
Materialia

References

YearCitations

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