Publication | Closed Access
TiSiN(Ag) films deposited by HiPIMS working in DOMS mode: Effect of Ag content on structure, mechanical properties and thermal stability
31
Citations
38
References
2019
Year
Materials ScienceMaterials EngineeringDoms ModeMaterial AnalysisAg ContentEngineeringNanotechnologySurface ScienceApplied PhysicsThermal Stability
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