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Determination of elastic parameters of Si3N4 thin films by means of a numerical approach and bulge tests

Materials EngineeringMaterials ScienceSi3n4 Thin FilmsEngineeringElasticity (Physics)Mechanical EngineeringApplied PhysicsElastic ParametersSiliceneSolid MechanicsBulge TestsThin FilmsSilicon On InsulatorMechanics Of MaterialsThin Film Processing