Publication | Closed Access
Tuning photoionization mechanisms of molecular hybrid materials for EUV lithography applications
30
Citations
23
References
2018
Year
Aromatic StructuresEngineeringElectron-beam LithographyInorganic PhotochemistryOrganic ShellSynthetic PhotochemistryChemistryBeam LithographyPhotocatalysisPhotopolymer NetworkHybrid MaterialsNanolithography MethodMaterials ScienceEuv Lithography ApplicationsPhotochemistryNanotechnologyMolecular Hybrid MaterialsPhotoionization MechanismsApplied PhysicsMetal Oxo ClustersOptoelectronics
Aromatic structures in organic shell stabilize photoionization products of metal oxo clusters, a new type of materials for EUV lithography.
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