Influence of the growth conditions of LT-AlN on quality of HT-AlN growth on Si (1 1 1) by metalorganic chemical vapor deposition - Concepedia

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Influence of the growth conditions of LT-AlN on quality of HT-AlN growth on Si (1 1 1) by metalorganic chemical vapor deposition

13

Citations

10

References

2018

Year

I. O. Mayboroda

Journal of Crystal Growth

Materials ScienceMaterials EngineeringAluminium NitrideEngineeringCorrosionSurface ScienceApplied PhysicsGrowth ConditionsSemiconductor Device FabricationChemical DepositionChemical Vapor DepositionEpitaxial GrowthHt-aln GrowthMicrostructure

References

	Year	Citations

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