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Photoacoustic characterization of nanowire arrays formed by metal-assisted chemical etching of crystalline silicon substrates with different doping level

Materials SciencePlasmonicsEngineeringCrystalline Silicon SubstratesOptical PropertiesNanotechnologyApplied PhysicsPhotoacoustic CharacterizationNanometrologySilicon On InsulatorOptoelectronicsNanowire ArraysNanolithography Method