Publication | Closed Access
A kinetic study of ZnO atomic layer deposition: Effects of surface hydroxyl concentration and steric hindrance
53
Citations
28
References
2018
Year
Materials ScienceSurface CharacterizationEngineeringCorrosionOxide ElectronicsSurface ScienceSurface Hydroxyl ConcentrationSteric HindranceChemistryChemical DepositionChemical Vapor DepositionKinetic Study
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