Publication | Closed Access

Structural alteration induced by substrate bias voltage variation in diamond-like carbon films fabricated by unbalanced magnetron sputtering

Materials EngineeringMaterials ScienceElectrical EngineeringStructural AlterationDiamond-like Carbon FilmsEngineeringDiamond-like CarbonCarbon-based MaterialNanoelectronicsApplied PhysicsMicroelectronicsCarbon-based FilmsUnbalanced Magnetron SputteringThin Film Processing