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Influence of TCO intermediate thin-layers on the electrical and thermal properties of metal/TCO/p-Si Schottky structure fabricated via RF magnetron sputtering

Materials EngineeringMaterials ScienceElectrical EngineeringEngineeringNanoelectronicsApplied PhysicsRf MagnetronMetal/tco/p-si Schottky StructureSemiconductor MaterialElectronic PackagingTco Intermediate Thin-layersMicroelectronicsThin Film ProcessingSemiconductor Device