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Fabrication of Silicon Nanowire Forests for Thermoelectric Applications by Metal-Assisted Chemical Etching

Materials ScienceNanoscale SystemEngineeringNanomaterialsNanoelectronicsNanotechnologyMetal-assisted Chemical EtchingApplied PhysicsThermoelectric MaterialSilicon Nanowire ForestsThermoelectric ApplicationsNanoscale ScienceMicroelectronicsSilicon On Insulator