Piezoelectric MEMS with multilayered Pb(Zr,Ti)O3 thin films for energy harvesting - Concepedia

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Piezoelectric MEMS with multilayered Pb(Zr,Ti)O3 thin films for energy harvesting

25

Citations

27

References

2018

Year

Kensuke Kanda, Shota Hirai, Takayuki Fujita, Kazusuke Maenaka

Sensors and Actuators A Physical

Materials ScienceElectrical EngineeringEnergy HarvestingEngineeringPiezoelectric NanogeneratorsApplied PhysicsPiezoelectric MemsPiezoelectricityPiezoelectric MaterialThin FilmsPyroelectricity

References

	Year	Citations

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