PECVD process parameter optimization: towards increased hardness of diamond-like carbon thin films

Abstract

Diamond-like carbon thin film coatings are extensively used in manufacturing, medical and aerospace industries due to their excellent tribological, mechanical, optical and biological properties. Due to the non-linear relationship of each process parameter in the deposition process, it is difficult to determine the response results without conducting large numbers of experiments. To counter this, a carefully designed experimentation scheme along with two nature-inspired metaheuristic algorithms are used in the current study. Hydrogen flow rate, Argon-C2H2 flow rate and deposition temperature are used as the design variables for maximizing the thin film hardness.