Publication | Open Access

Optimization and control of a thin film growth process: A hybrid first principles/artificial neural network based multiscale modelling approach

Materials ScienceEngineeringIndustrial EngineeringMechanical EngineeringNumerical SimulationPrinciples/artificial Neural NetworkProcess ControlMultiscale MaterialMultiscale StructureThin FilmsMultiscale PhenomenonThin Film ProcessingMultiscale Modeling