Publication | Closed Access
Two- and three-dimensional simulation analysis of microwave excited plasma for deposition applications: operation with argon at atmospheric pressure
33
Citations
26
References
2018
Year
EngineeringPhysicsPlasma SimulationApplied PhysicsDeposition ApplicationsAtmospheric PressureApplied Plasma PhysicMagnetohydrodynamicsThree-dimensional Simulation AnalysisComputational ElectromagneticsPlasma Application
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