Effect of roughness of substrate and sputtering power on the properties of TiN coatings deposited by magnetron sputtering for ATF

Weiwei Xiao, Hua Deng, Shuliang Zou, Yuhong Ren, Dewen Tang, Ming Lei, Changfei Xiao, Xi Zhou, Yao Chen

Journal of Nuclear Materials · 2018 · 73 citations · 23 references

Concepts

References

23