Evaluation of subsurface damage inherent to polished GaN substrates using depth-resolved cathodoluminescence spectroscopy - Concepedia

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Evaluation of subsurface damage inherent to polished GaN substrates using depth-resolved cathodoluminescence spectroscopy

DOI Full Paper Access

21

Citations

19

References

2018

Year

Jinhyung Lee, Jong Cheol Kim, Jong‐Sik Kim, Rajiv K. Singh, Arul Chakkaravarthi Arjunan, Haigun Lee

Thin Solid Films

Materials ScienceWide-bandgap SemiconductorSubsurface DamageEngineeringSurface ScienceApplied PhysicsAluminum Gallium NitrideGan Power DeviceCategoryiii-v SemiconductorDepth-resolved Cathodoluminescence Spectroscopy

References

	Year	Citations

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