Evaluation of subsurface damage inherent to polished GaN substrates using depth-resolved cathodoluminescence spectroscopy

Jinhyung Lee, Jong Cheol Kim, Jong‐Sik Kim, Rajiv K. Singh, Arul Chakkaravarthi Arjunan, Haigun Lee

Thin Solid Films · 2018 · 22 citations · 19 references

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