Publication | Closed Access
Creation of silicon vacancy in silicon carbide by proton beam writing toward quantum sensing applications
55
Citations
60
References
2018
Year
Proton BeamEngineeringPhysicsQuantum Sensing ApplicationsNanoelectronicsApplied PhysicsSemiconductor Device FabricationSilicon VacancyVacuum DeviceSilicon On InsulatorMicroelectronicsCarbide
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