A Two-DOF Ultrasonic Motor Using a Longitudinal–Bending Hybrid Sandwich Transducer

Abstract

A two-degrees-of-freedom (two-DOF) ultrasonic motor, which could output linear motions with two-DOF by using only one longitudinal–bending hybrid sandwich transducer, is proposed and tested in this paper. The motion in the horizontal ( <italic xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">X</i> ) direction is achieved by the hybrid of the second longitudinal and fifth bending vibrations of the motor, while the motion in the vertical ( <italic xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">Y</i> ) direction is gained by the composition of two orthogonal fifth bending vibrations. The proposed ultrasonic motor is designed and the principles for the two-DOF driving were analyzed. Then, the simulation analyses of the motor are accomplished to verify the described principles. Finally, a prototype is fabricated and its mechanical output characteristics are tested. The results indicate that the maximum no-load velocities of the motor in horizontal and vertical directions are 572 and 543 mm/s under the preload of 100 N and the voltage of 300 V <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">p-p</sub> , respectively. The maximum output forces in horizontal and vertical directions are 24 and 22 N when the preload is 200 N. The simulation and experiment results verify the feasibility of the proposed two-DOF ultrasonic motor.