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A scatter simulated annealing algorithm for the bi-objective scheduling problem for the wet station of semiconductor manufacturing

Mathematical ProgrammingEngineeringBi-objective Scheduling ProblemIndustrial EngineeringSemiconductor ManufacturingScheduling ProblemIntelligent OptimizationSimulated AnnealingProduction SchedulingComputer EngineeringSystems EngineeringScheduling (Production Processes)Modeling And SimulationCombinatorial OptimizationWet StationOperations Research