Effects of annealing on quality and stoichiometry of HfO2 thin films grown by RF magnetron sputtering - Concepedia

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Effects of annealing on quality and stoichiometry of HfO2 thin films grown by RF magnetron sputtering

39

Citations

48

References

2018

Year

Arun Vinod, Mahendra Singh Rathore, N. Srinivasa Rao

Materials ScienceMagnetismMaterials EngineeringSpintronicsEngineeringPhysicsNanoelectronicsOxide ElectronicsApplied PhysicsRf MagnetronThin FilmsEpitaxial GrowthHfo2 Thin FilmsThin Film ProcessingMagnetic Medium

References

	Year	Citations

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