The NG DIVA: A navigation grade differential inertial vibrating beam accelerometer

Abstract

This paper presents the last generation of the DIVA called NG DIVA (i.e. New Generation/Navigation Grade DIVA accelerometer), aiming to propose a very compact, navigation grade (bias stability better than 50 μg all errors combined, measurement range above 50 g), robust to harsh environment (first eigenfrequency above 3000 Hz) and easy to manufacture (collective micromachining by chemical etching). This performance improvement has required hard work at different levels that will be discussed here.