High Internal Quantum Efficiency of Nonpolar <i>a</i>-Plane AlGaN-Based Multiple Quantum Wells Grown on <i>r</i>-Plane Sapphire Substrate

Abstract

An internal quantum efficiency (IQE) as high as 39% was achieved with the nonpolar a-plane AlGaN-based multiple quantum wells (MQWs) grown on the r-plane sapphire substrate with metal organic chemical vapor deposition technology. Evident fourth order X-ray diffraction satellite peak and intense MQW-related exciton emission peak at a wavelength of 279.2 nm were observed, implying the successful growth of high quality nonpolar a-plane AlGaN-based MQWs. It was found that the employment of the trimethyl-aluminum (TMAl) flow duty-ratio modulation method played a crucial role in the epitaxial growth of the nonpolar a-plane AlGaN MQWs with sharp heterointerfaces and high IQE. Moreover, the unambiguous absence of the blue-shift in the MQWs-related exciton emission peak was verified in spite of the increase in the excitation power during the measurement of the excitation power-modulated photoluminescence spectra, indicating a complete elimination of the quantum confined Stark effect in the nonpolar AlGaN-based MQWs.