Recent experiments on plasma immersion ion implantation (and deposition) using discharges inside metal tubes - Concepedia

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Recent experiments on plasma immersion ion implantation (and deposition) using discharges inside metal tubes

15

Citations

8

References

2018

Year

C. Silva, André Ricardo Marcondes, H. Reuther, Gelson Biscaia de Souza

Surface and Coatings Technology

Recent ExperimentsElectrical EngineeringIon ImplantationEngineeringApplied PhysicsMetal TubesGas Discharge PlasmaMicroelectronicsPlasma ProcessingPlasma ApplicationElectrical Insulation

References

	Year	Citations

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