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Terminal sliding mode control with non-symmetric input saturation for vibration suppression of electrostatically actuated nanobeams in the presence of Casimir force

Vibration SuppressionCasimir ForceEngineeringApplied PhysicsNanophotonicsNano Electro Mechanical SystemActive Vibration ControlNonlinear Vibration ControlVibration ControlNon-symmetric Input Saturation