Publication | Closed Access
Impact of Hydrogen Passivation on Electrical Properties of Polysilicon Thin Films
14
Citations
11
References
2018
Year
Materials ScienceHydrogen PassivationElectrical EngineeringPolysilicon Thin FilmsEngineeringIntrinsic ImpurityApplied PhysicsSemiconductor Device FabricationThin FilmsSilicon On InsulatorElectrical PropertiesThin Film Processing
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