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Characterization of recrystallized depth and dopant distribution in laser recovery of grinding damage in single-crystal silicon

Materials ScienceLaser OpticsMaterials EngineeringAdvanced Laser ProcessingEngineeringLaser-induced BreakdownMechanical EngineeringApplied PhysicsLaser ApplicationsDopant DistributionLaser RecoveryLaser Processing TechnologyRecrystallized DepthLaser-assisted DepositionPulsed Laser DepositionMechanics Of MaterialsMicrostructure