Publication | Closed Access
Stress mechanisms of SiO2 and Nb2O5 thin films sputtered on flexible substrates investigated by finite element method
23
Citations
40
References
2018
Year
Materials ScienceFinite Element MethodMaterials EngineeringEpitaxial GrowthStress MechanismsEngineeringFlexible ElectronicsNb2o5 Thin FilmsSurface ScienceApplied PhysicsMechanical EngineeringThin FilmsSilicon On InsulatorMicroelectronicsChemical Vapor DepositionThin Film ProcessingMicrostructure
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