Concepedia

Publication | Closed Access

Optimal target sputtering mode for aluminum nitride thin film deposition by high power pulsed magnetron sputtering

DOI

31

Citations

40

References

2018

Year

Donglin Ma, Huaiyuan Liu, Qiaoyuan Deng, Wenmao Yang, Kaspars Siliņš, Nan Huang, Y.X. Leng
Vacuum

References

YearCitations

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