Publication | Closed Access
Obtaining of superhydrophobic surface in RF capacitively coupled discharge in AR/CH4 medium
11
Citations
56
References
2018
Year
Materials ScienceEngineeringGlow DischargeSurface ScienceApplied PhysicsAr/ch4 MediumSuperhydrophobic SurfaceSuper-hydrophobic SurfaceGas Discharge Plasma
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