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Threshold switching selector and 1S1R integration development for 3D cross-point STT-MRAM

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2017

Year

Abstract

To develop very high density STT-MRAM, 3D cross-point architecture is desirable, which requires a selector integrated with a pMTJ memory element. We present a two terminal bi-directional threshold switching selector based on doped-HfOx materials and integrated one selector/one perpendicular MTJ (1S1R) cross-point device. The selector shows sharp turn-on slope of around 2.8 mV/dec, high On/Off ratio (above 10 <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">7</sup> ), low on-resistance (∼1 kΩ), low threshold voltage (0.3 V), low holding voltage (0.02 V), fast turn on speed (10 ns), and good thermal stability (400°C). Switching operations between “AP” and “P” state have been demonstrated for the 1S1R STT-MRAM device. This integrated 1S1R enables implementation of the 3D STT-MRAM array for high density memory application.