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Real-Time Stress Measurement in SiO2 Thin Films during Electrochemical Lithiation/Delithiation Cycling

Materials ScienceEngineeringStress-induced Leakage CurrentOxide ElectronicsSurface ScienceApplied PhysicsReal-time Stress MeasurementElectrochemical Lithiation/delithiation CyclingThin FilmsSilicon On InsulatorMicroelectronicsThin Film ProcessingElectrochemistrySio2 Thin Films