Low-power and high-sensitivity system-on-chip hall effect sensor

Abstract

Low-cost, low-power, and high-sensitivity System-on-Chip (SoC) Hall Effect sensors for 0.18 μm and 0.13 μm technologies and beyond are developed in this work. A best-in-class current-related sensitivity S <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">I</sub> of 418 V/A*T is achieved by a Hall device with an area of 42 μm × 42 μm. Small offset voltage ranges within +/-1.05 mV, as well as excellent sensor reliability, are demonstrated. The Hall sensors are available for manufacturing.