High‐Efficiency Dielectric Metasurfaces for Polarization‐Dependent Terahertz Wavefront Manipulation

Abstract

Abstract Recently, metasurfaces made up of dielectric structures have drawn enormous attentions in the optical and infrared regimes due to their high efficiency and designing freedom in manipulating light propagation. Such advantages can also be introduced to terahertz frequencies where efficient functional devices are still lacking. Here, polarization‐dependent all‐silicon terahertz dielectric metasurfaces are proposed and experimentally demonstrated. The metasurfaces are composed of anisotropic rectangular‐shaped silicon pillars on silicon substrate. Each metasurface holds dual different functions depending on the incident polarizations. Furthermore, to suppress the reflection loss and multireflection effect in practical applications, a high‐performance polarization‐independent antireflection silicon pillar array is also proposed, which can be patterned at the other side of the silicon substrate. Such all‐silicon dielectric metasurfaces are easy to fabricate and can be very promising in developing next‐generation efficient, compact, and low‐cost terahertz functional devices.