Publication | Closed Access
Correlation between structural and mechanical properties of silicon doped DLC thin films
46
Citations
26
References
2017
Year
Materials ScienceMaterial AnalysisEngineeringMechanical PropertiesMechanical EngineeringApplied PhysicsThin Film Process TechnologyThin FilmsChemical Vapor DepositionDlc Thin FilmsSilicon On InsulatorThin Film Processing
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