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Comparing XPS on bare and capped ZrN films grown by plasma enhanced ALD: Effect of ambient oxidation

Materials EngineeringMaterials ScienceAmbient OxidationZrn FilmsEngineeringAluminium NitrideOxidation ResistanceOxide ElectronicsSurface ScienceApplied PhysicsChemical DepositionChemical Vapor DepositionElectrochemistry