Superconducting properties of NbTiN thin films deposited by high-temperature chemical vapor deposition

Abstract

We report on the superconducting properties of ${\mathrm{Nb}}_{1\ensuremath{-}x}{\mathrm{Ti}}_{x}\mathrm{N}$ thin films of thickness $\ensuremath{\sim}10$ nm, with different Ti fraction $x$ in the range $0\ensuremath{\le}x\ensuremath{\le}0.5$, deposited by high-temperature chemical vapor deposition. In this parameter range, we observe that the superconducting critical temperature (${T}_{c}$) increases with $x$. We analyze the possible role played by various parameters---Debye temperature, electron-phonon coupling constant, and Coulomb pseudopotential---in determining the observed variation of ${T}_{c}$ with $x$.