Sequential Elemental Dealloying Approach for the Fabrication of Porous Metal Oxides and Chemiresistive Sensors Thereof for Electronic Listening

Abstract

Highly porous materials, with large surface area and accessible space, variable chemical compositions, and porosity at different length scales, have captivated the attention of researchers in recent years as an important family of functional materials. Here, we report a novel approach to grow porous metal oxides (PMOs) by sequential elemental dealloying in which a highly mobile element gets dealloyed first under the thermal treatment (annealing) and facilitates the formation of PMOs. Subsequently, a chemiresistive sensor based on porous SnO₂ was fabricated for humidity sensing at room temperature which shows a high sensitivity of 348 in a fully humid [>99% relative humidity (RH)] atmosphere with an accuracy of 1% RH change. In addition, the sensor is highly durable and reproducible. Eventually, the chemiresistive sensor has been exploited for electronic listening toward speaking, whistling, and breath monitoring. Overall, the results advocate the fabrication of PMOs and the development of resistive humidity sensors for electronic listening as well as for biomedical applications.