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Publication | Open Access

Correlation between mechanical and microstructural properties of molybdenum nitride thin films deposited on silicon by reactive R.F. magnetron discharge

DOIFull Paper Access

33

Citations

52

References

2017

Year

Boudjemaa Bouaouina, Aurélien Besnard, S. E. H. Abaidia, Aissam Airoudj, F. Bensouici
Surface and Coatings Technology

References

YearCitations

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