Publication | Closed Access
Growth of high-quality AlN epitaxial film by optimizing the Si substrate surface
47
Citations
23
References
2017
Year
Materials EngineeringMaterials ScienceAluminium NitrideEngineeringSurface ScienceApplied PhysicsSi Substrate SurfaceMolecular Beam EpitaxyEpitaxial GrowthThin Film Processing
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