Coherent solid-state LIDAR with silicon photonic optical phased arrays

TLDR

The paper demonstrates the first coherent solid‑state LIDAR system built on silicon photonics optical phased arrays. The authors implement an integrated FM‑CW transmitter/receiver with triangular modulation and a cascaded multi‑group phase‑shifter array to enable on‑chip beam collimation, steering, and compact control. The fabricated 300‑mm CMOS‑compatible device demonstrates solid‑state beam steering and ranging, indicating a path toward low‑cost, compact on‑chip LIDAR.

Abstract

We present, to the best of our knowledge, the first demonstration of coherent solid-state light detection and ranging (LIDAR) using optical phased arrays in a silicon photonics platform. An integrated transmitting and receiving frequency-modulated continuous-wave circuit was initially developed and tested to confirm on-chip ranging. Simultaneous distance and velocity measurements were performed using triangular frequency modulation. Transmitting and receiving optical phased arrays were added to the system for on-chip beam collimation, and solid-state beam steering and ranging measurements using this system are shown. A cascaded optical phase shifter architecture with multiple groups was used to simplify system control and allow for a compact packaged device. This system was fabricated within a 300 mm wafer CMOS-compatible platform and paves the way for disruptive low-cost and compact LIDAR on-chip technology.