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HPPMS deposition from composite targets: Effect of two orders of magnitude target power density changes on the composition of sputtered Cr-Al-C thin films

Materials EngineeringMaterials ScienceHppms DepositionEngineeringSurface ScienceApplied PhysicsComposite TargetsThin Film Process TechnologyThin FilmsPulsed Laser DepositionChemical DepositionChemical Vapor DepositionThin Film Processing