Publication | Closed Access
Nonlinear coupled vibration of electrostatically actuated clamped–clamped microbeams under higher-order modes excitation
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Citations
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References
2017
Year
EngineeringMicromachinesMicromechanicsMechanicsMechanical EngineeringMechanical SystemsNonlinear VibrationsMicroactuatorHigher-order Modes ExcitationMicro-electromechanical SystemVibration ControlNonlinear VibrationClamped–clamped Microbeams
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