Novel single-source precursors for SiB<sub>x</sub>C<sub>y</sub>N<sub>z</sub> film deposition - Concepedia

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Novel single-source precursors for SiB<sub>x</sub>C<sub>y</sub>N<sub>z</sub> film deposition

11

Citations

23

References

2017

Year

I. S. Merenkov, B. Gostevskii, Tamara V. Basova, Yu. M. Zhukov, Igor Kasatkin, V. I. Kosyakov, M. N. Khomyakov, M. L. Kosinova

New Journal of Chemistry

Abstract

A novel type of single-source CVD precursor – Me<sub>3</sub>SiCCB[N(SiMe<sub>3</sub>)<sub>2</sub>]<sub>2</sub> – has been synthesized and successfully tested for the first time in SiBCN film deposition.

References

	Year	Citations

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