Publication | Open Access
Plasma-assisted and thermal atomic layer deposition of electrochemically active Li<sub>2</sub>CO<sub>3</sub>
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Citations
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References
2017
Year
EngineeringElectrode-electrolyte InterfaceCrystal Growth TechnologyChemistryChemical DepositionPlasma ProcessingChemical EngineeringThermodynamicsMaterials ScienceBattery Electrode MaterialsLithium-ion BatteryEnergy StorageElectrochemical ProcessProcess Table TemperatureElectrochemistryLi-ion Battery MaterialsApplied PhysicsBatteriesChemical Kinetics
Growth per cycle as a function of process table temperature for both plasma-assisted (squares) and thermal (circles) ALD processes.
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