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Diversity of contributions leading to the nominally n–type behavior of ZnO films obtained by low temperature Atomic Layer Deposition

Oxide HeterostructuresMaterials ScienceEngineeringN–type BehaviorOxide ElectronicsSurface ScienceApplied PhysicsThin Film Process TechnologyThin FilmsChemical DepositionZno FilmsChemical Vapor DepositionThin Film Processing