Accurate Removal of Implanted Gallium and Amorphous Damage from TEM Specimens after Focused Ion Beam (FIB) Preparation

Abstract

Journal Article Accurate Removal of Implanted Gallium and Amorphous Damage from TEM Specimens after Focused Ion Beam (FIB) Preparation Get access P Nowakowski, P Nowakowski E.A. Fischione Instruments, Inc., Export, PA 15632 USA Search for other works by this author on: Oxford Academic Google Scholar CS Bonifacio, CS Bonifacio E.A. Fischione Instruments, Inc., Export, PA 15632 USA Search for other works by this author on: Oxford Academic Google Scholar MJ Campin, MJ Campin E.A. Fischione Instruments, Inc., Export, PA 15632 USA Search for other works by this author on: Oxford Academic Google Scholar ML Ray, ML Ray E.A. Fischione Instruments, Inc., Export, PA 15632 USA Search for other works by this author on: Oxford Academic Google Scholar PE Fischione PE Fischione E.A. Fischione Instruments, Inc., Export, PA 15632 USA Search for other works by this author on: Oxford Academic Google Scholar Microscopy and Microanalysis, Volume 23, Issue S1, 1 July 2017, Pages 300–301, https://doi.org/10.1017/S1431927617002185 Published: 04 August 2017