Publication | Closed Access
Synthesis and characterization of boron carbon oxynitride films with tunable composition using methane, boric acid and ammonia
137
Citations
48
References
2017
Year
Materials ScienceMaterials EngineeringChemical EngineeringBoron NitrideEngineeringBoron CarbonOxide ElectronicsSurface ScienceApplied PhysicsBcno FilmsBoric AcidChemistryThin FilmsThin Film Process TechnologyTunable CompositionChemical Vapor DepositionThin Film ProcessingBorophene
This study highlights the synthesis and characterization of 2D BCNO films using the atmospheric pressure CVD technique.
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