A Fixed-Beam Leaky-Wave Cavity-Backed Slot Antenna Manufactured by Bulk Silicon MEMS Technology

Abstract

A fixed-beam leaky-wave slot antenna with an air-filled back cavity is proposed in the millimeter-waveband. The antenna is fabricated based on the bulk silicon microelectromechanical systems micromachining technology. This micromachining process can etch silicon wafers and plate them with gold. Because all surfaces of the proposed antenna are plated with gold, electromagnetic waves can transmit in the air medium without any other dielectric. The air-filled structure contributes to achieving a leaky-wave slot antenna with fixed beam as operating frequency varies. A prototype of the proposed antenna is fabricated to verify the design strategy. The measured results show that the impedance bandwidth of the proposed antenna is 55-67 GHz and within the operating frequency band, the main beam direction only varies from 48° to 53°, which confirms the fixed-beam characteristic. The measured peak gain varies from 9.1 to 10.5 dBi in the operating frequency band.