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Properties of silicon nanocrystals with boron and phosphorus doping fabricated via silicon rich oxide and silicon dioxide bilayers

Materials ScienceEngineeringSilicon Rich OxideNanomaterialsNanotechnologyOxide ElectronicsApplied PhysicsSemiconductor MaterialChemistrySilicon NanocrystalsPhosphoreneSilicon On InsulatorPhosphorus Doping