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Diamond like carbon coatings doped by Si fabricated by a multi-target DC-RF magnetron sputtering method - Mechanical properties, chemical analysis and biological evaluation

Materials ScienceDiamond-like CarbonChemical EngineeringEngineeringCarbon-based MaterialChemical AnalysisNanomaterialsNanoelectronicsNanotechnologyCarbon CoatingsApplied PhysicsChemical Vapor DepositionMulti-target Dc-rf Magnetron